When microscopy meets metrology Nano Point Scanner
Introducing the Nano Point Scanner
NPS White Light Confocal Proflometry
- Submicron Z Precision
- Ultra Fast Profiling
- ISO Certified Measurement
- Automatization & Reports
HIROX 3D Digital Microscopy
- High Resolution Image Quality
- Ultra Fast 3D Stacking
- Multiple Lighting Possibilities
- Full Flexibility: Sample & Stand
Hirox & NPS: the complete inspection and measurement solution
Introducing the Nano Point Scanner
Confocal White Light Profilometry
The NPS Technology
The NPS is an innovative non-contact confocal 3D profilometer measuring altitude in real time, for profile or surface scanning:
- The white light LED beam is projected through a beamsplitter and a chromatic lens to the surface of the sample
- The reflected light beam from the sample is filtered in a confocal pinhole, isolating one single wavelength in perfect focus
- The NPS spectrometer is accurately translating this wavelength into height information and display it visually in the NPS software
- Up to 2000 height information per second are acquired in real time creating a profile when moving the XY stage
You can select between two modes: Profile or Surface
NPS Confocal White Light Sensor
Works on any Type of Surface
The confocal system generates a sharply focused observation plane. Points located above or below the object surface are completely out of focus, so that the type of material does not matter: the sample can be mirror, shinny, reflective or rough - it can be opaque or completely transparent.
Quality and Standards Compliance - ISO
White light chromatic confocal technology is ISO certified for roughness measurement and is currently used by many companies and research centers all over the world.
The NPS allows high precision XYZ axis measurement beyond the limitation of ISO 25178-602 optical depth of field.
High Speed Profile (1-axis scan)
By moving the sample with the high precision motorized XY stage in one axis, the NPS acquires a series of focused points at a chosen interval, creating a fast profile: the measurement of height, distance, radius, line roughness (Ra, Rz, Rt,...) and much more can be done within seconds!
High Resolution Surface (2-axis scan)
By creating a series of aligned profiles, the NPS acquires XYZ
information creating a high resolution 3D surface: volume, surface
roughness (Sa, Sz,...), complex shape, 3D waviness and much more
can be measured.
The duration of the scan is adjusted by the
amount of lines, scanning speed and the dimension of the sample!
Unlimited Applications
- Aerospace
- Watchmaking
- Mobile phones
- Art restoration
- Automotive
- Semiconductors
- Displays
- Security printing
- Optical lenses
- Micro-electronics
- Archeology
- Rasor blades
Multiple measurement possibilities
By combining high precision measurements with advanced metrology software, the NPS will match all your metrology requierements
PROFIL & MULTI PROFIL
The fastest way to execute a measurement! After scanning between two points, the NPS will display the profile: you can then adjust the level, measure horizontal & vertical distances as well as Ra, Rz and Rt measurements.
For advanced measurement, select the desired Hirox Map
template inside the NPS menu.
With the new programable multi-profile function, simply execute
several individual profiles combined in one single report.
SHAPE & FORMS
Surface shape and geometry can be easily measured: on a spherical object, the measurement results of a curvature can be compared to manufacturing specification for example. Other shapes such as lines, planes, spheres, cylinders or freeform are typical objects that the NPS can measure: length, height, radius, angle, volume and much more. With large measuring ranges up to 4000 micrometer, various shape and forms can be captured and measured.
Planéité, ondulation & coplanarité
Distorsion, déformation, ondulation ou planéité sont faciles à mesurer sur de larges zones avec le Nano Point Scanner. Grâce à la table XY pouvant aller jusqu’à 1500x1500mm, il est possible de mesurer les défauts qui peuvent apparaitre à cause d’une machine ou d’une anomalie de travail, d’un stress résiduel, de vibrations ou d’un traitement de chaleur par exemple.
Coplanarity is another parameter that requires long distances and
high level of Z accuracy. This can be done either thanks to a profile or
a surface.
Rugosité, texture & défauts
Surface metrology determines surface topography, which is essential for confirming a surface’s suitability for its function. Surface measurement includes profile roughness (Ra), surface roughness (Sa), surface texture, asperity and structural characterization.
For manufacturing and design purposes, measurement is critical to ensure that the finished material meets the design specification.
- Distances
- Volume
- Roughness
- Waviness
- Roundness
- Topography
- Flatness
- Coplanarity
- Deformation
- Tribology
The NPS Sensors
The right sensors for your requirements
The NPS System provides a wide range of sensors to achieve seamless highly accurate measurement.
Depending on your application, you can select the best sensors for your needs: small measuring range for highest accuracy and roughness measurement or large measuring range for tall sample and form measurements.
NPS Sensors Specifications
| NPS SENSORS | NP1 | NP2 | NP3 | NP4 | NP5 | NP6 | NPX-1 *** | NPX-2 *** | NPX-6 *** |
|---|---|---|---|---|---|---|---|---|---|
| Measuring range | 150 μm | 400 μm | 1400 μm | 4000 μm | 12000 µm | 24000 µm | 1000 μm | 2000 µm | 6000 µm |
| Working distance | 3.3 mm | 10.8 mm | 12.2 mm | 16.5 mm | 26.6 mm | 20 mm | 18.5 mm | 19.2 mm | 13.7 mm |
| Max sample slope * | 42° | 28° | 25° | 21° | 14° | 8.5° | 44° | 42° | 32° |
| Lateral resolution | 1.3 μm | 1.7 μm | 2.6 μm | 7 μm | 11 µm | 11µm | 2.5 μm | 3.8 µm | 5.2 µm |
| Height accuracy ** | 76 nm | 169 nm | 500 nm | 1195 nm | 3350 nm | 6850 nm | 334 nm | 675 nm | 1750 nm |
| Suitable for roughness | OK | OK | OK | OK | OK | OK |
* Max sample slope on a perfect mirror surface
** Minimum height-measurement depending on XY-stage
*** NPX is not compatible with deltashift on the 100mm x 100mm stage
Highlights of the NPS
NPS interface: fast and easy
NPS Interface: fast and easy A dedicated software to get quickly and easily the best out of white light confocal technology!
Profile or surface?
Simply use the high resolution optics from the RH-2000 to do the
selection of the points of interest (deltashift function) and let the NPS
do the rest: profile, multi-profile or surface are just a few clicks away
Fast scan
Select the scanning speed,
X and Y steps are displayed,
as well as the total scanning
area: start the scan!
Live display
View the profile or false colour scan displayed in real time during the scan.
Level & measure
For fast tests and measurements,
use the built-in auto function to adjust the level,
then measure height and
distances directly within the
NPS interface.
XYZ & AutoFocus
Speed control: fine tune the Hirox XY motorized movement!
Auto Focus: bring your sensor to the center of the measuring range with just one click!
Point of interest
Set, go and save:
multiple points of interest can be easily used for profile, multi-profile or surface scans!
Sensor control
Adjust frequency and light
intensity according to the reflectivity of your sample and the
acqusition speed you wish.
Easy measure and report using Hirox Maps
You can customize up to 4 templates for profile or surface. Apply them to your sample automatically in one click.
Creat your first inspection report and use it as a template for similar samples.
Scan all your samples and it will generate a report for each sample.
Get statistics, averages and Fail/Pass of all your samples in a single excel file.
Mountains Map - Logiciel avancé de métrologie
By combining high-precision measurement with advanced metrology software, the NPS will match all your metrology requierements.
La technologie Mountains !
La technologie Mountains Map est la solution la plus avancée en matière de métrologie sur le marché :
- Real-time imaging of 3D-surface topography
- 3D-surface overlays for fast feature location: combination of height color + image intensity from the NPS
- Removal of data acquisition or sample artefacts
- Area extraction, level and shape correction
- Suite complète de mesures sur profils et surfaces 3D avec traçabilité des utilisateurs et des processus
Powerful & simple
While many functions involve complex calculations,
every effort is made to ensure that accessing and
using these functions is as easy as possible.
Also, once a measurement report has been done, all
the parameters used can be easily applied to a new
sample with tolerance limits showing in green / red.
Every report can then become a measurement template
for fast and easy workflow with fail/pass!
ISO & national metrology standards
Mountains Map has an installed base of 10,000+ licenses worldwide, supports ISO and national metrology standards. Mountains Map works in over 10 languages!
Form & non-measured points removal
The NPS software always exports unprocessed raw data, which can then be filtered in Hirox Maps. You can for example display or fill the non-measured points but also remove the form to keep only the surface
Easy reporting :
- Easy integration into lab and production environments
- Export of all numerical results
- Easy publication
- Export of analysis documents, pages and individual images up to 1200 dpi.
Analysis automation
Powerful automation tools ensure high productivity:
series of surface data sets can be analyzed automatically
and common sequences of analysis step can be saved
for insertion any future analysis document.
Pass/fail criteria can be specified
for any parameter and green
(pass)/red (fail) «traffic lights»
are displayed automatically on
the report. Alll the results can be
extracted as CSV/Excel format.
Microscopie numérique hybride : NPS & HRX-01
Optical 3D surface metrology for industry and reasearch
The perfect combination between optical excellence and non-contact metrology:
Microscope numérique 3D HIROX HRX-01 avec le NPS – une solution universelle pour vos applications.
Hirox Optics - High-resolution
Highest optical power
from 0.1x up to 10,000x
Multiple lighting technologies
BF / DF / POL / DIFF / UV,…
Patented HIROX rotary head
360° motorized inspection
Z-axis - Ultra-fine steps
Motorized Z-axis
75 mm avec pas de 50 nm
Additional manual Z
80mm manual Z-axis
Special design
compact or bridge system
Delta Shift Function
NPS Sensors - High-precision
Wide measuring range
from 100µm up to 24,000µm
Long working distance
from 3mm up to 25mm
Various types of measurement
form, flatness, roughness, ....
XY-axis - High-accuracy
Wide range of movement
De 50×50 mm à 1500×1500 mm
Special high-precision stage
Mouvement motorisés jusqu’à 1500mm
Small XY steps
à partir de 0,05 µm
Hirox 3D mouse:
- easy XYZ movement
- set start-end points/scan
Exemple de stand Table XY motorisée 500×500 avec structure pont
High-precision 3D-scans
Research & Development, process & production control, laboratory and much more!
Tribology
The NPS system revealed complex scratch paterns on a sratch test tribology sample.
Fresnel lens
Pattern measurement on a complex lens structure
Scratch tests
Measurement of submicron scratches on a metal surface
Atacama stone
The Atacama stone is a rare artefac due to its complex surface structure. The NPS high accuracy measurement helped the Museum of Natural History in Madrid to better visualise the surface.
High-precision 3D-scans
Steel
Basketball
3D embossing paper packaging
Leather
Bullet casing
Electric razor head
Watch engraving
System configuration
Choose the perfect NPS sensor for your application!
Choose the perfect Hirox lens for your application!
Choose the perfect stand for your application!
| XY MOTORIZED STAGE | AS-XY1175 | AS-XY1010 | AS-XY2010 | ST-J500+ | other dimensions |
|---|---|---|---|---|---|
| Dimensions | 110mm x 75mm | 100mm x 100mm | 200mm x 100mm | 500mm x 500mm | on request |
| Step per pulse | 0.05 μm | 0.1 μm | 0.1 μm | 0.2 μm | on request |
| Position accuracy | 1 μm | 1 μm | 1 μm | 4 μm | on request |
| Speed | 5 mm/s | 10 mm/s | 10 mm/s | 10 mm/s | on request |
| Max Z vibration noise | 100 nm | 200 nm | 200 nm | 500 nm | on request |
| Suitable for roughness | OK | OK | OK | on request |
| NPS SENSORS | NP1 | NP2 | NP3 | NP4 | NP5 | NP6 | NPX-1 *** | NPX-2 *** | NPX-6 *** |
|---|---|---|---|---|---|---|---|---|---|
| Measuring range | 150 μm | 400 μm | 1400 μm | 4000 μm | 12000 µm | 24000 µm | 1000 μm | 2000 µm | 6000 µm |
| Working distance | 3.3 mm | 10.8 mm | 12.2 mm | 16.5 mm | 26.6 mm | 20 mm | 18.5 mm | 19.2 mm | 13.7 mm |
| Max sample slope * | 42° | 28° | 25° | 21° | 14° | 8.5° | 44° | 42° | 32° |
| Lateral resolution | 1.3 μm | 1.7 μm | 2.6 μm | 7 μm | 11 µm | 11µm | 2.5 μm | 3.8 µm | 5.2 µm |
| Height accuracy ** | 76 nm | 169 nm | 500 nm | 1195 nm | 3350 nm | 6850 nm | 334 nm | 675 nm | 1750 nm |
| Suitable for roughness | OK | OK | OK | OK | OK | OK |
* Max sample slope on a perfect mirror surface
** Minimum height-measurement depending on XY-stage
*** NPX is not compatible with deltashift on the 100mm x 100mm stage
| SOFTWARE | |
|---|---|
| Operating system: Windows 7, Windows 8, Windows 10 | NPS software: selection of calibrated sensors, setup of XY stage, light intensity & scanning frequency, XYZ movement control. Profile mode: acquisition and live display of profile, height/length measurement, level correction, multi profile, export in Hirox Maps pre defined template including: height, roughness, curvature and default, saving and loading XY coordinates, delta shift function |
| Recommended PC: min i5 6th gen and 8gb RAM | Surface mode: Acquisition and live display of profile and height information, export in Hirox Maps pre-defined template. Hirox Map - Mountains: processing of NPS files for advanced measurement including line and area roughness, volume, shape removal, tolerances with pass/fail display, batch processing, export in STL and other 3D formats, and much more... |